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Hafnium Chloride

HfCl4

CAS: 13499-05-3
 
Hafnium chloride (HfCl₄) is a white to yellowish hygroscopic crystalline solid, widely recognized as a key precursor in high-purity hafnium compound synthesis and advanced thin-film deposition. Its strong Lewis acidity and volatility make it an essential material for semiconductor, aerospace, and catalyst industries.
 
Availability:

Name: Hafnium(IV) Chloride
MF: HfCl4
MW: 320.3
CAS: 13499-05-3
MP: 432°C
BP: 315.47°C
Solubility: Soluble in methanol and acetone, soluble in water
Appearance: White to yellowish powder
Storage conditions: Inert gas environment, room temperature


Key Applications

  • Semiconductor Manufacturing

Used as an ALD/CVD precursor for depositing high-κ hafnium oxide (HfO₂) gate dielectrics in logic and memory devices.

  • Aerospace & Superalloys

Serves as a starting material for hafnium metal and alloys with high corrosion resistance and thermal stability.

  • Catalysis

Functions as a Lewis acid catalyst in fine chemical and pharmaceutical synthesis.

  • Optical & Coating Materials

Precursor for hafnium-based optical coatings and specialized ceramics.

  • Nuclear Technology

Applied in control rod materials due to hafnium’s neutron absorption properties.


Custom packaging for R&D or production scale.

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