Tris(Cyclopentadienyl) Yttrium

Name: Tris(cyclopentadiene) yttrium ; YCp3

MF: C15H15Y

MW: 284.19

CAS: 1294-07-1

Appearance: Off-white to yellow powder

MP: 296°C

BP: 200 °C

Sensitivity: Air & moisture sensitive

Key Properties

1. High volatility and sufficient thermal stability for vapor-phase deposition

2. Produces uniform, stoichiometric Y₂O₃ thin films

3. Compatible with semiconductor ALD/CVD tools and bubbler systems

4. Requires inert atmosphere handling (N₂ or Ar)

Main Applications

• Semiconductors & Microelectronics

Used as an ALD/CVD precursor for yttrium oxide films in logic, memory, and high-k dielectric applications.

• Dielectric & Gate Oxides

Source for Y₂O₃ gate dielectrics, offering high permittivity and thermal stability.

• Optical & Functional Coatings

Applied in optoelectronics, protective coatings, and advanced materials research.

Handling & Storage

1. Store in airtight containers under inert gas (argon or nitrogen recommended)

2. Avoid contact with air, moisture, and heat to maintain stability

3. Handle using glovebox or Schlenk line techniques

Custom packaging for R&D or production scale.

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