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Tetrakis (Dimethylamino) Titanium

Molecular Formula: C8H24N4Ti
CAS: 3275-24-9

Tetrakis (dimethylamino) titanium (C8H24N4Ti) is a yellow to orange liquid with a strong ammoniacal odor and high reactivity. It is an important titanium precursor, commonly used in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes to deposit high-purity titanium thin films or titanium dioxide layers. Due to its high volatility and good thermal stability, tetrakis (dimethylamino) titanium is widely used in the semiconductor, optoelectronics, and precision coating industries.
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Tetrakis (Dimethylamino) Titanium Basic Properties

  • Appearance: Yellow to orange liquid

  • Molecular Weight: 224.17

  • Melting Point: <4°C

  • Boiling Point: 50 °C0.5 mm Hg(lit.)

  • Density: 0.947 g/mL at 25 °C(lit.)

  • Storage Conditions: Flammables area

  • Solubility: Soluble in a variety of organic solvents, such as hexane, toluene, etc.; decomposes into titanium dioxide and dimethylamine when in contact with water

  • Stability: Sensitive to moisture, needs to be sealed and stored in an inert gas environment

Tetrakis (Dimethylamino) Titanium Key Features

High purity and reactivity

Tetrakis (dimethylamino) titanium typically has a purity exceeding 99.9%, ensuring efficient reaction and uniform thin film production during semiconductor deposition.

Excellent thermal stability

Stability over a wide temperature range ensures controllable vaporization performance during CVD and ALD processes, making it suitable for industrial production.

High volatility

This compound vaporizes efficiently at relatively low temperatures, facilitating transport within the deposition system and enabling precise control of the deposition rate.

Compatible with a variety of substrate materials

Tetrakis (dimethylamino) titanium can be used for thin film deposition on a variety of substrate materials, including silicon, aluminum oxide, and silicon nitride, demonstrating strong compatibility.

Tetrakis (Dimethylamino) Titanium Main Applications

Semiconductor industry

Used as a titanium source precursor in ALD/CVD processes for depositing titanium metal or titanium dioxide thin films, as well as in the manufacture of microelectronic components.

Optoelectronic materials

In optical coatings and solar cell materials, tetrakis (dimethylamino) titanium can be used to generate high-refractive-index TiO₂ films, thereby improving light energy conversion efficiency.

Protective coatings

The Ti-based film formed by vapor deposition has excellent hardness and corrosion resistance and is suitable for surface treatment of precision instruments and cutting tools.

R&D and material science

It is widely used in the research of titanium-based nanomaterials, catalyst supports and new thin film materials.

Precautions

  1. Tetrakis (dimethylamino) titanium reacts easily with water to produce ammonia and titanium dioxide precipitation. Therefore, it must be stored under dry, inert gas (such as argon or nitrogen).

  2. It may decompose at high temperatures and release harmful gases. Keep away from heat and fire sources.

  3. It is recommended to use special corrosion-resistant containers, seal them and store them in a cool, ventilated chemical warehouse.

  4. If leakage occurs, use dry inert adsorbent (such as silica gel) to absorb it and do not use water to wash it.

  5. In case of accidental contact with skin, rinse immediately with plenty of water for at least 15 minutes and seek medical help.

FAQ

1. Does the purity of this product affect film quality?

Yes. The higher the purity of tetrakis (dimethylamino) titanium, the better the film's uniformity, density, and dielectric properties. Therefore, we recommend using high-purity grades (>99.9%).


2. Why is an inert atmosphere used during storage?

Because this compound is highly reactive with moisture in the air, an inert atmosphere effectively prevents decomposition and extends the shelf life of the product. 


For more information or to purchase tetrakis (dimethylamino) titanium, please feel free to contact us via email or WhatsApp.

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