CAS 15112-89-7丨Tris(dimethylamino)silane - Wolfa

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Tris(dimethylamino)silane丨CAS 15112-89-7

CAS: 15112-89-7
Chemical Formula/Abbreviation: TDMAS

Tris(dimethylamino)silane not only has good stability and high vapor pressure, but also exhibits considerable reactivity. Therefore, it is widely used as a precursor source in current ALD method for SiO2 deposition research.

Synonyms: TDMAS, 3DMAS, LS 1460, amino)siL, (Me2N)3SiH, 3DMAS : [(CH3)2N]3SiH, Tris(dimethyamino)silane, Tri(dimethylamino)silane, TRIS(DIMETHYLAMINO)SILANE, Tris(dimethylamido)silane

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Product Description

Tris(dimethylamino)silane Basic Properties

Molecular Formula	C6H19N3Si
Appearance	Colorless to pale yellow liquid
Molecular Weight	161.32
Melting Point	<0°C
Boiling Point	145 °C
Density	0,838 g/cm3
Refractive Index	1.4247
Flash Point	25°C
Acidity Coefficient (pKa)	10.93±0.70(Predicted)
Sensitivity	Sensitive to air and humidity
Purity	≧98%
Package Information	100g, 500g, 1kg, or customized

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