CAS 186598-40-3丨Di(t-butylamino)silane - Wolfa

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Di(t-butylamino)silane

CAS: 186598-40-3
Chemical Formula/Abbreviation: BTBAS

Di(t-butylamino)silane is a type of (BTBAS) silane coupling agent. BTBAS is a precursor of chemical vapor-liquid chemistry and can deposit uniform silicon nitride. It can be used to prepare silicon nitride thin films, semiconductor devices, and shallow trench isolation films.

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Product Description

Di(t-butylamino)silane Basic Properties

Molecular Formula	C8H22N2Si
Appearance	Colorless liquid
Molecular Weight	174.36
Melting Point	167°C
Density	0,816 g/cm3
Refractive Index	1.4236
Flash Point	30°C
Acidity Coefficient (pKa)	11.91±0.70(Predicted)
Purity	99.9%(99.9999%-Si)
Package Information	100g, 500g, 1kg, or customized

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