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Pentakis(Dimethylamino)Niobium(V)

TDMANb

CAS: 19824-58-9
 
TDMANb is a high-purity niobium organometallic precursor widely used in Atomic Layer Deposition(ALD) and Chemical Vapor Deposition (CVD). With excellent volatility and thermal stability, it enables the growth of uniform niobium-based thin films such as niobium oxide (Nb2O2) and niobium nitride (NbN), which are important in semiconductors, high-k dielectrics, and advanced coatings.
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Name: Pentakis(Dimethylamino)Niobium; TDMANb
MF: C2H7NNb
MW: 137.99
CAS: 19824-58-9
Appearance: Violet-black Crystals



Key Properties


  1. High volatility and good thermal stability suitable for vapor-phase deposition

  2. Produces conformal thin films with excellent step coverage

  3. Compatible with semiconductor-grade bubbler and gas delivery systems

  4. Requires inert handling conditions (N₂ or Ar)



Main Applications


  • Semiconductors & Microelectronics

Precursor for ALD/CVD Nb₂O₅ thin films, applied in high-k dielectric layers and logic/memory devices.

  • Barrier & Electrode Layers

Used in NbN deposition for conductive layers and diffusion barriers.

  • Materials Research

Niobium source for advanced studies in superconducting, dielectric, and catalytic materials.


Custom packaging for R&D or production scale.

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