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Molybdenum Hexacarbonyl

Mo(CO)6

CAS: 13939-06-5
 
Molybdenum hexacarbonyl (Mo(CO)₆) is an organometallic compound known for its volatility and utility as a precursor for the deposition of molybdenum thin films in semiconductor and materials science applications. This compound serves as a valuable metal source for CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) processes, enabling the deposition of highly conductive molybdenum layers. It is also widely used as a catalyst precursor in organic reactions and plays a crucial role in the synthesis of metal carbonyl complexes.
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