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Molybdenum Hexacarbonyl

Mo(CO)6

CAS: 13939-06-5

Molybdenum hexacarbonyl (Mo(CO)₆) is an organometallic compound known for its volatility and utility as a precursor for the deposition of molybdenum thin films in semiconductor and materials science applications. This compound serves as a valuable metal source for CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) processes, enabling the deposition of highly conductive molybdenum layers. It is also widely used as a catalyst precursor in organic reactions and plays a crucial role in the synthesis of metal carbonyl complexes.

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Product Description

Name: Molybdenum hexacarbonyl
MF: Mo(CO)6
MW: 264
CAS: 13939-06-5
Appearance: white crystal

Key Applications

Semiconductor Industry:
Mo(CO)₆ is used as a precursor for depositing molybdenum thin films, essential in semiconductor devices, memory chips, and integrated circuits (ICs). It enables precise layer deposition for device interconnects, thin-film transistors (TFTs), and barrier layers.
Catalysis:
In catalytic processes, Mo(CO)₆ is used as a metal source in various organic reactions, such as the metathesis of olefins, polymerization reactions, and as a catalyst for hydrogenation processes.
Thin-Film Coatings:
Mo(CO)₆ is also used in creating highly conductive molybdenum coatings for applications in solar cells, aerospace materials, and coatings for high-temperature environments.
Nanomaterial Fabrication:
Molybdenum hexacarbonyl is applied in the creation of nanostructures, enabling the fabrication of advanced materials like molybdenum-based nanowires and nanodots.

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