CAS: 33271-88-4
Chemical Formula/Abbreviation: CpZr
Tris(dimethylamino)cyclopentadienyl zirconium not only has good stability and vapor pressure, but also good reactivity. It is soluble in organic solvents such as hydrocarbons and carbon tetrachloride, and can be used in
CVD or ALD technology to prepare zirconium oxide thin films.
Synonyms: CpZr(NMe2)3 CpTDMAZ, CPTDMAZ2, Tris(dimethylamino)cyclopentadienylzirconium, Cyclopentadienyl Tris(dimethylamino) Zirconium, (cyclopentadienyl)zirconium tris(dimethylamide)